The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 1995
Filed:
Feb. 03, 1994
Jonathan C Dahm, Austin, TX (US);
Gregory E Bartlett, Phoenix, AZ (US);
Gregory Ferguson, Austin, TX (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A layer of material (14) comprising silicon, such as an SiO.sub.2 layer, overlying a silicon substrate (12) of a semiconductor device (10), is dry etched without the need for traditional halocarbon gases (such as CHF.sub.3, CF.sub.4, and C.sub.2 F.sub.6) which are known green-house gases. A fluorine source, for producing the active fluorine radicals needed to etch silicon, is selected from either HF or F.sub.2 gases. A carbon-oxygen source, for providing and stabilizing polymer build-up in the reactor, is selected from either CO or CO.sub.2. An additional hydrogen source may be added as needed.