Company Filing History:
Years Active: 2012
Title: Greg Bettencourt: Innovator in Plasma Processing Technology
Introduction
Greg Bettencourt is a notable inventor based in Fremont, CA (US). He has made significant contributions to the field of plasma processing technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of plasma processing chambers and electrode assemblies.
Latest Patents
One of Greg's latest patents is for a silicon-based showerhead electrode. This innovative design includes a backside, a frontside, and multiple showerhead passages that extend from the backside to the frontside. The electrode is made from single crystal silicon and features partial recesses along the backside, which help maintain a specific thickness of silicon. Another significant patent involves an electrode assembly and plasma processing chamber that utilizes a thermally conductive gasket and o-rings. This invention aims to improve thermal management within plasma processing chambers, ensuring efficient heat transfer between components.
Career Highlights
Greg Bettencourt is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop cutting-edge technologies that are crucial for modern manufacturing processes.
Collaborations
Throughout his career, Greg has collaborated with talented individuals such as Roger Patrick and Raj Dhindsa. These partnerships have contributed to the advancement of innovative solutions in the field of plasma processing.
Conclusion
Greg Bettencourt's contributions to plasma processing technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor manufacturing processes.