The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Mar. 01, 2012
Greg Bettencourt, Fremont, CA (US);
Raj Dhindsa, San Jose, CA (US);
George Diercks, Washington Township, OH (US);
Randall A. Hardin, Miamisburg, OH (US);
Jon Keihl, Versailles, OH (US);
Duane Lytle, Vandalia, OH (US);
Alexei Marakhtanov, Albany, CA (US);
Roger Patrick, Mountain View, CA (US);
John Pegg, Englewood, OH (US);
Shannon Spencer, Huber Heights, OH (US);
Greg Bettencourt, Fremont, CA (US);
Raj Dhindsa, San Jose, CA (US);
George Diercks, Washington Township, OH (US);
Randall A. Hardin, Miamisburg, OH (US);
Jon Keihl, Versailles, OH (US);
Duane Lytle, Vandalia, OH (US);
Alexei Marakhtanov, Albany, CA (US);
Roger Patrick, Mountain View, CA (US);
John Pegg, Englewood, OH (US);
Shannon Spencer, Huber Heights, OH (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A silicon-based showerhead electrode is provided that can include a backside, a frontside, and a plurality of showerhead passages extending from the backside of the silicon-based showerhead electrode to the frontside of the silicon-based showerhead electrode. The silicon-based showerhead electrode can comprise single crystal silicon. The silicon-based showerhead electrode may further include a plurality of partial recesses formed within the single crystal silicon along the backside of the silicon-based showerhead electrode. The plurality of partial recesses can leave a thickness of single crystal silicon between each of the partial recesses and the frontside of the silicon-based showerhead electrode.