Company Filing History:
Years Active: 2012
Title: John Pegg: Innovator in Plasma Processing Technology
Introduction
John Pegg is a notable inventor based in Englewood, OH (US), recognized for his contributions to plasma processing technology. He holds a total of 2 patents, showcasing his innovative approach to engineering solutions in this field.
Latest Patents
Pegg's latest patents include advancements in showerhead electrodes. One patent describes a silicon-based showerhead electrode that features a backside, a frontside, and multiple showerhead passages extending from the backside to the frontside. This electrode is designed with single crystal silicon and includes partial recesses that enhance its functionality. Another patent focuses on electrode assemblies and plasma processing chambers, detailing an assembly that comprises a thermal control plate and a silicon-based showerhead electrode. This design allows for effective thermal management while minimizing frictional contact during disengagement.
Career Highlights
John Pegg is currently employed at Lam Research Corporation, where he applies his expertise in plasma processing technology. His work has significantly contributed to the development of advanced manufacturing processes in the semiconductor industry.
Collaborations
Pegg collaborates with talented professionals such as Greg Bettencourt and Raj Dhindsa, further enhancing the innovative environment at Lam Research Corporation.
Conclusion
John Pegg's contributions to plasma processing technology through his patents and work at Lam Research Corporation highlight his role as a key innovator in the field. His advancements continue to influence the industry and pave the way for future innovations.