Company Filing History:
Years Active: 2012-2015
Title: Duane Lytle: Innovator in Electrode Technology
Introduction
Duane Lytle is a prominent inventor based in Vandalia, OH (US), known for his contributions to the field of electrode technology. With a total of 4 patents to his name, Lytle has made significant advancements in the design and functionality of various electrode assemblies and plasma processing chambers.
Latest Patents
Lytle's latest patents include innovative designs for anchoring inserts and showerhead electrodes. One of his notable inventions is a showerhead electrode that features backside inserts positioned in recesses along the electrode's backside. These inserts are designed with a tool engaging portion that includes lateral shielding portions to prevent tools from extending beyond the threaded outside diameter. Additionally, the electrode comprises a plurality of torque-receiving slots that are strategically arranged to avoid on-axis rotation. Another significant invention is a silicon-based showerhead electrode that includes multiple passages extending from the backside to the frontside, enhancing its efficiency and performance.
Career Highlights
Duane Lytle is currently employed at Lam Research Corporation, where he continues to push the boundaries of innovation in electrode technology. His work has been instrumental in developing solutions that improve the manufacturing processes in semiconductor fabrication.
Collaborations
Throughout his career, Lytle has collaborated with notable colleagues, including Randall Hardin and Greg Bettencourt. These partnerships have fostered a creative environment that has led to the development of cutting-edge technologies.
Conclusion
Duane Lytle's contributions to electrode technology exemplify his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in semiconductor manufacturing, making him a valuable asset in the field.