Location History:
- San Luis Obispo, CA (US) (2004 - 2005)
- Atascadero, CA (US) (2005)
Company Filing History:
Years Active: 2004-2005
Title: The Innovative Contributions of Greg Barbour
Introduction
Greg Barbour is a notable inventor based in San Luis Obispo, California. He has made significant contributions to the field of technology, particularly in the area of planarization and optical measurement. With a total of 3 patents to his name, Barbour continues to push the boundaries of innovation.
Latest Patents
One of Barbour's latest patents is focused on in situ feature height measurement. This invention provides methods and apparatus for measuring the height of features on an object being planarized. The method involves polishing the surface of the object using a polishing pad with a cavity, while directing incident light from the cavity to optically measure the feature heights. This process allows for the collection of measurement data during polishing, enhancing the accuracy of the planarization process.
Another significant patent is the polishing pad sensor assembly with a damping pad. This invention features a polishing pad that includes an optical assembly designed to minimize wear on a wafer workpiece. The optical assembly is strategically placed within the pad to allow movement in response to applied forces. Additionally, a damping pad is incorporated to reduce vibrations, thereby increasing the sensitivity of optical measurements.
Career Highlights
Greg Barbour is currently employed at Strasbaugh, a company known for its advanced technology in the semiconductor industry. His work at Strasbaugh has allowed him to develop innovative solutions that improve the efficiency and effectiveness of planarization processes.
Collaborations
Barbour collaborates with David G Halley, a fellow innovator in the field. Their partnership has fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Greg Barbour's contributions to the field of technology through his patents and work at Strasbaugh highlight his role as an influential inventor. His innovative approaches to planarization and optical measurement continue to impact the industry positively.