Company Filing History:
Years Active: 2019
Title: Go Shirozu: Innovator in Extreme Ultraviolet Light Technology
Introduction: Go Shirozu is a prominent inventor based in Oyama, Japan. He has made significant contributions to the field of extreme ultraviolet (EUV) light generation. His innovative work has led to the development of advanced technologies that are crucial for various applications, particularly in the semiconductor industry.
Latest Patents: Go Shirozu holds a patent for an "Extreme Ultraviolet Light Generation Device and Method for Controlling Extreme Ultraviolet Light Generation Device." This invention includes a laser device, a target detector, and a controller. The laser device emits a pulsed laser beam, while the target detector identifies a target substance supplied for the laser beam within a chamber. The controller manages the laser device based on a burst signal, alternating between burst and idle periods. During the burst period, an extreme ultraviolet light beam is generated, and in the idle period, its generation is paused. If the detected target substance exceeds a predetermined size during the idle period, the controller reduces the intensity of the laser beam entering the chamber.
Career Highlights: Go Shirozu is currently employed at Gigaphoton Inc., a company known for its cutting-edge technology in the field of photonics. His work at Gigaphoton has positioned him as a key player in the development of EUV light sources, which are essential for next-generation lithography processes.
Collaborations: Go Shirozu collaborates with talented individuals in his field, including Yuta Takashima and Yoshifumi Ueno. Their combined expertise contributes to the advancement of technologies that push the boundaries of what is possible in extreme ultraviolet light generation.
Conclusion: Go Shirozu's innovative contributions to extreme ultraviolet light technology exemplify the impact of dedicated inventors in advancing scientific and industrial applications. His work continues to influence the future of semiconductor manufacturing and related fields.