Glenn A Pfefferkorn

Title: Glenn A Pfefferkorn: Innovator in Semiconductor Processing

Introduction

Glenn A Pfefferkorn is a notable inventor based in Fremont, California. He has made significant contributions to the field of semiconductor processing, particularly through his innovative patent. His work focuses on improving the efficiency and effectiveness of thermal processing systems.

Latest Patents

Glenn A Pfefferkorn holds a patent for "Systems and methods for epitaxial processing of a semiconductor substrate." This invention describes a thermal processing system and method designed for processing semiconductor substrates. The system utilizes an inductor to couple energy to a susceptor, with specific spacing configured for the steady-state portions of a chemical vapor deposition (CVD) epitaxial deposition process. The invention enhances temperature uniformity during transient portions of the process, addressing common issues such as slip caused by temperature non-uniformities. Additionally, the patent includes aspects that improve thermal shielding of the edges and top surface of the susceptor, with thicker susceptors contributing to better temperature uniformity.

Career Highlights

Glenn A Pfefferkorn is associated with Mattson Technology, Inc., where he applies his expertise in semiconductor technology. His work at the company has been instrumental in advancing thermal processing techniques, which are crucial for the production of high-quality semiconductor devices.

Collaborations

Glenn has collaborated with notable colleagues, including Robert D Mailho and Mark J O'Hara. Their combined efforts in the field of semiconductor processing have contributed to the development of innovative solutions and technologies.

Conclusion

Glenn A Pfefferkorn's contributions to semiconductor processing through his patent and work at Mattson Technology, Inc. highlight his role as an influential inventor in the industry. His innovations continue to impact the efficiency of semiconductor manufacturing processes.