Company Filing History:
Years Active: 2001-2004
Title: Innovations by Inventor Gladys So-Wan Lo
Introduction
Gladys So-Wan Lo is a prominent inventor based in Fremont, California. With a remarkable portfolio featuring three patents, she has made significant contributions to the fields of semiconductor processing and materials science. Her innovative approaches have led to advancements in manufacturing techniques that benefit the technology sector.
Latest Patents
One of her latest patents includes the development of H2O vapor as a processing gas for crust, resist, and residue removal for post-ion implant resist strip. This innovative use of H2O vapor efficiently strips photoresist material from substrates without damaging the underlying layers, making the process both safe and cost-effective.
Another significant patent involves a method and apparatus for etching a gold metal layer using a titanium hardmask. This method enables the precise etching of gold metallization in plasma processing chambers by utilizing an oxidizing gas alongside hydrochloric acid containing gases, showcasing her expertise in optimizing chemical processes in electronics manufacturing.
Career Highlights
Gladys Lo is currently affiliated with Lam Research Corporation, a leading player in the semiconductor equipment industry. Her work has not only pushed the boundaries of what is achievable in her field but has also laid the groundwork for future innovations in semiconductor processing.
Collaborations
Throughout her career, Gladys has collaborated with notable colleagues, including David W. Mytton and Anthony L. Chen. These partnerships have fostered a creative and innovative environment, contributing to the cutting-edge developments that they pursue at Lam Research Corporation.
Conclusion
Gladys So-Wan Lo embodies the spirit of innovation and dedication in the technology sector. Her patents demonstrate her commitment to advancing semiconductor processing techniques and her contributions to the field continue to inspire future inventors and researchers. With her ongoing work at Lam Research Corporation, the impact of her innovations is sure to be felt for years to come.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.