This inventor holds 1 USPTO granted patent. Top assignee: Kla-Tencor Technologies Corporation. Active years: 2010.
Company Filing History:
Years Active: 2010
Title: The Innovative Contributions of Geroge Kren
Introduction
Geroge Kren is a notable inventor based in Los Altos Hills, California. He has made significant contributions to the field of metrology inspection tools, particularly in the semiconductor industry. His innovative approach has led to the development of a unique system that enhances the inspection process of dual-sided specimens.
Latest Patents
Geroge Kren holds a patent for a "Method and apparatus for scanning, stitching and damping measurements of a double sided metrology inspection tool." This system is designed for inspecting specimens such as semiconductor wafers. It provides scanning capabilities for dual-sided specimens using a damping arrangement that filters out unwanted acoustic and seismic vibrations. The system includes an optics arrangement that scans a first portion of the specimen, along with a translation or rotation arrangement that positions the specimen for further scanning. Additionally, it features means for stitching the scans together, which not only dampens the specimen but also reduces the need for smaller and less expensive optical elements. He has 1 patent to his name.
Career Highlights
Geroge Kren is associated with Kla-Tencor Technologies Corporation, a company known for its advanced metrology and inspection solutions. His work at Kla-Tencor has been instrumental in pushing the boundaries of technology in the semiconductor sector.
Collaborations
Throughout his career, Geroge has collaborated with esteemed colleagues such as Paul J Sullivan and Rodney C Smedt. These collaborations have further enriched his contributions to the field.
Conclusion
Geroge Kren's innovative work in metrology inspection tools has made a significant impact on the semiconductor industry. His patented technology exemplifies the importance of advancements in inspection systems, paving the way for more efficient and effective processes.
