This inventor holds 7 USPTO granted patents and 1 published patent application. Top assignee: Lam Research Corporation. Active years: 2008-2020.
Location History:
- Fishkill, NY (US) (2008)
- Wappingers Falls, NY (US) (2011 - 2020)
Company Filing History:
Years Active: 2008-2020
Title: The Innovative Contributions of George Stojakovic
Introduction
George Stojakovic is an accomplished inventor based in Wappingers Falls, NY, known for his significant contributions to the field of technology with a total of seven patents to his name. His innovations primarily focus on the intricacies of bevel etching processes, showcasing his expertise in materials science and engineering.
Latest Patents
Among the latest patents developed by Stojakovic are two notable inventions for bevel etchers: the Lower Plasma-Exclusion-Zone Rings and the Upper Plasma-Exclusion-Zone Rings.
The **Lower Plasma-Exclusion-Zone Ring** is designed to enhance the bevel etching of substrates. This invention features a ring-shaped body with a unique radially-outer stepped surface that effectively manages the plasma exclusion zone during the etching process. The ring is composed of advanced materials, including aluminum oxide, aluminum nitride, silicon, silicon carbide, silicon nitride, and yttria, which contribute to its functionality and durability.
In addition, the **Upper Plasma-Exclusion-Zone Ring** serves a complementary function in the etching process, providing a distinctive radially-inner stepped surface that integrates seamlessly into the ring's structure. Similar to its counterpart, this ring is crafted from the same high-performance materials and is pivotal for achieving precise bevel edge etching.
Career Highlights
Stojakovic currently works with Lam Research Corporation, an industry leader specializing in semiconductor fabrication equipment. His role at the company has enabled him to innovate and contribute to critical advancements in etching technologies, reinforcing the significance of his work.
Collaborations
Throughout his career, George Stojakovic has collaborated with esteemed colleagues, including professionals such as Tong Fang and Yunsang Kim. Together, they have exchanged ideas and expertise, contributing to pioneering developments in their field.
Conclusion
George Stojakovic's innovative patent portfolio and his collaborations with fellow experts exemplify his dedication to advancing technology in the semiconductor industry. His work continues to influence the design and functionality of etching processes, demonstrating the critical role that inventors play in shaping the future of technology.