LaFayette, CA, United States of America

George L Coad


Average Co-Inventor Count = 1.8

ph-index = 10

Forward Citations = 391(Granted Patents)


Company Filing History:


Years Active: 1980-2004

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13 patents (USPTO):Explore Patents

Title: The Innovative Contributions of George L. Coad

Introduction

George L. Coad is an esteemed inventor based in LaFayette, California, known for his significant contributions to the field of semiconductor technology. With a total of 13 patents to his name, Coad has dedicated his career to advancing the methods and tools used in the production and handling of semiconductor wafers. His latest invention exemplifies his innovative approach and technical expertise, particularly in edge handling systems.

Latest Patents

One of Coad's notable patents is the Edge Handling Wafer Chuck, which is designed to maintain a semiconductor wafer at a desirable orientation while rotating at high speeds. This innovative edge handling chuck comprises a cylindrical plate that holds a silicon wafer using multiple spring-loaded edge wafer clamps. A gas arrangement plays a crucial role in stabilizing the wafer due to spinning vortex effects. Gas is directed through a center hole in the cylindrical plate and released through pressure relief openings, allowing for optimal contact with the wafer's lower surface and countering any top pressure that may arise. This inventive solution enhances the reliability and efficiency of wafer handling during processing.

Career Highlights

Coad has made significant strides in his career, working with prominent companies such as Varian Associates, Inc. and KLA-Tencor Corporation. His work in these organizations has led to numerous advancements in semiconductor equipment and technology, impacting the quality and efficiency of wafer processing.

Collaborations

Throughout his career, Coad has collaborated with knowledgeable professionals, including R. Howard Shaw and Martin A. Hutchinson. These collaborations have facilitated the exchange of innovative ideas and the development of cutting-edge technologies in the semiconductor industry.

Conclusion

George L. Coad's contributions to the field of semiconductor technology, particularly through his patents and collaborations, showcase his commitment to innovation and excellence. His work not only propels technological advancement but also sets a standard for future inventions in the industry. As an inventor, Coad continues to influence the way semiconductor wafers are handled, ensuring that they meet the demands of modern technology.

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