Company Filing History:
Years Active: 2003-2004
Title: George D Papasoulitotis: Innovator in Chemical Vapor Deposition
Introduction
George D Papasoulitotis is a notable inventor based in Cupertino, CA (US). He has made significant contributions to the field of chemical vapor deposition, particularly in the area of high aspect ratio structures. With a total of 2 patents, his work has advanced the technology used in various applications.
Latest Patents
One of his latest patents focuses on gap fill for high aspect ratio structures. This innovative process employs chemical vapor deposition techniques to fill narrow width gaps, typically at least 3:1 in aspect ratio and 1.5 microns or less, with a significantly reduced incidence of voids or weak spots. The deposition process utilizes hydrogen as a process gas in a reactive mixture within a plasma containing a CVD reactor. Additionally, the process gas includes dielectric forming precursor molecules such as silicon and oxygen-containing compounds.
Career Highlights
George D Papasoulitotis is currently associated with Novellus Systems Incorporated, where he continues to push the boundaries of innovation in his field. His expertise in chemical vapor deposition has positioned him as a key player in the industry.
Collaborations
Throughout his career, George has collaborated with talented individuals such as Atiye Bayman and Md Sazzadur Rahman. These collaborations have further enriched his work and contributed to the advancements in chemical vapor deposition technologies.
Conclusion
George D Papasoulitotis is a distinguished inventor whose contributions to chemical vapor deposition have made a significant impact in the field. His innovative approaches and collaborations continue to drive advancements in technology.
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