This inventor holds 1 USPTO granted patent and 4 published patent applications. Top assignee: Samsung Electronics Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Geongu Jang - Innovator in Flow Control Technologies
Introduction
Geongu Jang is an inventor based in Suwon-si, South Korea. He has made significant contributions to the field of flow control technologies. Although he currently holds no granted patents, his innovative ideas are reflected in his latest patent applications.
Latest Patent Applications
Geongu Jang's recent patent applications include the following:
1. **MASS FLOW CONTROLLER, FLOW CONTROL METHOD USING THE SAME, AND SUBSTRATE PROCESSING METHOD INCLUDING THE SAME** - This application discloses mass flow controllers for substrate processing apparatuses, flow control methods, and substrate processing methods. The flow control method involves receiving a mode selection signal, controlling a flow control valve under different modes to allow fluid flow rates to change accordingly. The method includes applying distinct voltages to piezoelectric stack assemblies connected to the flow control valve.
2. **SLIT VALVE APPARATUS** - This application describes a slit valve apparatus that features a door plate, valve rod, and guide housing. The design includes an L-motion block and a cam block, which work together to facilitate the opening and closing of the valve. The apparatus also incorporates a connector that prevents the door plate from rotating, ensuring efficient operation.
Conclusion
Geongu Jang's innovative work in flow control technologies showcases his potential as an inventor. His latest patent applications reflect his commitment to advancing substrate processing methods and valve apparatus designs.