This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2003-2006.
Location History:
- Chiba, JP (2003)
- Chiba-ken, JP (2006)
Company Filing History:
Years Active: 2003-2006
Title: Gen Yasuhara: Innovator in Polishing Technology
Introduction
Gen Yasuhara is a notable inventor based in Chiba-ken, Japan. He has made significant contributions to the field of polishing technology, particularly in the semiconductor industry. With a total of 2 patents, Yasuhara's work focuses on improving the efficiency and effectiveness of polishing methods.
Latest Patents
Yasuhara's latest patents include a chemical mechanical polishing method and apparatus. This innovative method involves four steps to polish an oxide film and a protective film on a substrate with recesses. The first step utilizes a polishing pad and a polishing agent containing cerium oxide particles to planarize the oxide film through relative rotational motion. The second step continues the polishing process to maintain the planarized property of the oxide film. The third step exposes at least a portion of the protective film, while the fourth step ensures that the oxide film is substantially removed, leaving the protective film exposed. Throughout these steps, torque values are measured to monitor the polishing process.
Another significant patent is the design of a retaining ring with a three-layer structure. This wafer polishing apparatus features a polishing head equipped with a retainer ring that suppresses the radial movement of the wafer during polishing. The retainer ring consists of an attachment plate, a ceramic friction ring in contact with the polishing pad, and a resin spacer positioned between the attachment plate and the friction ring.
Career Highlights
Gen Yasuhara is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has allowed him to develop and refine his innovative polishing techniques, contributing to advancements in semiconductor manufacturing.
Collaborations
Yasuhara has collaborated with notable colleagues such as Suzuki Kenji and Yoshihiro Sunada. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Gen Yasuhara's contributions to polishing technology have made a significant impact in the semiconductor industry. His innovative methods and apparatuses continue to enhance the efficiency of polishing processes, showcasing his dedication to advancing technology.