The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2003
Filed:
Oct. 27, 2000
Applicant:
Inventors:
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 5/00 ; B24B 3/704 ;
U.S. Cl.
CPC ...
B24B 5/00 ; B24B 3/704 ;
Abstract
A wafer polishing apparatus comprising a polishing head having a retainer ring provided around the periphery of a wafer W for suppressing movement of the wafer W in the radial direction during polishing. The retainer ring comprises an attachment plate affixed to the polishing head , a ceramic friction ring brought into contact with a polishing pad , and a resin spacer provided between the attachment plate and the friction ring