Gavin Richards

Title: Gavin Richards: Innovator in Conductive Nitride Films

Introduction

Gavin Richards is a notable inventor based in Newtown, CT (US). He has made significant contributions to the field of microelectronics through his innovative methodologies. His work focuses on improving the nucleation of conductive nitride films, which are essential for various electronic applications.

Latest Patents

Gavin holds a patent for a "Method for nucleation of conductive nitride films." This patent presents an improved methodology for the nucleation of certain metal nitride substrate surfaces. The process utilizes specific silicon-containing halides, silicon-containing amides, and metal precursors, in conjunction with nitrogen-containing reducing gases. The methodology includes a pretreatment step that enhances nucleation, resulting in a microelectronic device substrate with a metal nitride film thickness of about 10 Å to about 15 Å and less than 1% void area. Once nucleation is achieved, traditional layer-upon-layer deposition can occur rapidly.

Career Highlights

Gavin is currently employed at Entegris, Inc., where he continues to develop innovative solutions in the field of microelectronics. His work has been instrumental in advancing the technology related to conductive nitride films.

Collaborations

Gavin collaborates with talented coworkers, including Thomas H Baum and Han Wang. Their combined expertise contributes to the success of their projects and innovations.

Conclusion

Gavin Richards is a prominent inventor whose work in the nucleation of conductive nitride films has the potential to significantly impact the microelectronics industry. His innovative methodologies and collaborations highlight his commitment to advancing technology in this field.