Location History:
- Fremont, CA (US) (2012 - 2013)
- San Ramon, CA (US) (2011 - 2016)
Company Filing History:
Years Active: 2011-2016
Title: Gautam Bhattacharyya: Innovator in Plasma Processing Technology
Introduction
Gautam Bhattacharyya is a prominent inventor based in San Ramon, CA (US). He has made significant contributions to the field of plasma processing technology, holding a total of 5 patents. His work primarily focuses on enhancing the efficiency and functionality of semiconductor manufacturing processes.
Latest Patents
Among his latest innovations is the "Insulated dielectric window assembly of an inductively coupled plasma processing apparatus." This invention features a dielectric window designed to improve the performance of plasma processing equipment. It includes an upper polymeric ring that insulates the outer edge of the dielectric window from cooler ambient conditions, while a lower polymeric ring protects the lower surface from the chamber surface that supports the window.
Another notable patent is the "Gasket with positioning feature for clamped monolithic showerhead electrode." This invention pertains to an electrode assembly used in plasma reaction chambers for semiconductor substrate processing. The assembly consists of an upper showerhead electrode that is mechanically secured to a backing plate using spaced cam locks. A thermally and electrically conductive gasket with projections is compressed between the showerhead electrode and the backing plate, ensuring optimal performance during operation.
Career Highlights
Gautam Bhattacharyya is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His role involves developing innovative solutions that enhance plasma processing technologies, contributing to the advancement of semiconductor manufacturing.
Collaborations
Throughout his career, Gautam has collaborated with several talented individuals, including Gregory R Bettencourt and Sandy Chao. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.
Conclusion
Gautam Bhattacharyya's contributions to plasma processing technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.