Company Filing History:
2 out of 5,349 
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Years Active: 1982-2003
Title: Gary W. Looney: Innovator in Resonator Fabrication
Introduction
Gary W. Looney is a notable inventor based in Bordentown, NJ (US), recognized for his contributions to the field of resonator fabrication. With a total of 4 patents to his name, Looney has made significant advancements in the technology surrounding whispering gallery mode resonators.
Latest Patents
One of his latest patents is titled "Method of fabricating a whispering gallery mode resonator using CVD EPI and a bonded silicon wafer." This innovative process begins with a bonded silicon wafer, which is selected based on the desired thickness of separating silicon oxide and superficial silicon. The thicknesses are meticulously chosen to achieve the desired operating characteristics of the device. The process involves forming a masking oxide and creating holes with the necessary diameter for the pedestal, which are then opened down to the separating silicon oxide. If KOH is utilized, the etch will automatically stop at the oxide. Following the silicon etch, the oxide is opened to the silicon substrate.
Another significant patent by Looney is "High temperature annealing to improve SIMOX characteristics." This invention provides a method for treating a SIMOX wafer to substantially reduce oxygen precipitates and contaminants such as heavy metals and carbon. The method includes forming a protective layer on the SIMOX surface, heating the wafer and protective layer to dissolve and diffuse the precipitates and contaminants into the protective layer, and then slowly cooling the wafer to allow continued diffusion during the cooling process.
Career Highlights
Throughout his career, Gary W. Looney has worked with prominent organizations, including RCA Inc. and the United States of America as represented by the Secretary of the Air Force. His work has significantly impacted the field of semiconductor technology and resonator fabrication.
Collaborations
Looney has collaborated with esteemed colleagues such as Paul H. Robinson and Lubomir L. Jastrzebski, contributing to various projects and advancements in their respective fields.
Conclusion
Gary W. Looney's innovative work in resonator fabrication and his contributions to semiconductor technology have established him as a significant figure in the field. His patents reflect a commitment to advancing technology and improving device performance.
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