Gary J Johnson

Title: Innovations by Gary J Johnson

Introduction

Gary J Johnson is an accomplished inventor based in Wappingers Falls, NY (US). He has made significant contributions to the field of nanotechnology and lithography systems. With a total of two patents to his name, Johnson's work showcases his expertise and innovative spirit.

Latest Patents

One of Johnson's latest patents is the "Mask Carrier." This invention is designed for the masks used in Electron Projection Lithography and other workpieces in nanotechnology. The mask carrier features a rectangular frame with four electrostatic chucks on the top surface, which hold the mask above a central aperture. This aperture has an electron absorber on the bottom to suppress backscattering. The frame is supported by a bottom carrier that grips it with a set of flexures, which are flexible in the z-direction, stiff in the azimuthal direction, and flexible in the radial direction.

Another notable patent is the "Non-Contact Autofocus Height Detector for Lithography Systems." In this invention, focus adjustment in a particle beam lithography system is controlled by measuring the gap between the workpiece and a reference surface, such as the bottom surface of the focus lens. This is achieved using a pair of capacitive sensors mounted on an arm that rotates to position one sensor on the beam axis to measure the workpiece height, while the other measures the height of the reference surface. The sum of the two readings remains constant for a given gap dimension, ensuring measurement accuracy is unaffected by the arm's position within the gap.

Career Highlights

Gary J Johnson is currently employed at International Business Machines Corporation (IBM), where he continues to innovate and contribute to advancements in technology. His work at IBM has allowed him to explore various applications of his inventions in real-world scenarios.

Collaborations

Throughout his career, Johnson has collaborated with notable colleagues, including David J Pinckney and Rodney A Kendall. These collaborations have further enriched his work and expanded the impact of his inventions.

Conclusion

Gary J Johnson is a prominent inventor whose contributions to nanotechnology and lithography systems have led to significant advancements in the field. His innovative patents reflect his dedication to improving technology and enhancing precision in various applications.