This inventor holds 4 USPTO granted patents. Top assignee: International Business Machines Corporation. Active years: 1984-2007.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Wappingers Falls, NY (US) (1984 - 1989)
- St. Albans, VT (US) (2007)
Company Filing History:
Years Active: 1984-2007
Title: Garth A Brooks: Innovator in Chemical Mechanical Polishing
Introduction
Garth A Brooks is a notable inventor based in Wappingers Falls, NY (US). He has made significant contributions to the field of chemical mechanical polishing, holding a total of 4 patents. His work has advanced the methods used in semiconductor fabrication and multilevel wiring structures.
Latest Patents
One of his latest patents is a chemical mechanical polishing method. This method involves forming a structure, an array of structures, and a memory cell. The process includes several steps: forming a trench in a substrate, depositing a first layer of polysilicon, and chemical-mechanical-polishing the first layer at a specific temperature. The method continues with the removal of an upper portion of the first polysilicon, followed by the deposition of a second layer and another round of chemical-mechanical-polishing at a different temperature.
Another significant patent is related to planarization through silylation. This process is designed for forming a planarized multilevel ship wiring structure. It starts with a substrate that has a metal stud for vertical wiring. A quartz layer is deposited, and a thick planarizing photoactive photoresist is applied. The photoresist undergoes a silylation process, converting it into a silicate that matches the etch rate of quartz. Unwanted portions are then etched back to the level of the stud.
Career Highlights
Garth A Brooks is currently employed at International Business Machines Corporation (IBM). His work at IBM has allowed him to explore innovative solutions in the semiconductor industry. His patents reflect his commitment to advancing technology and improving manufacturing processes.
Collaborations
Some of his notable coworkers include Nancy Anne Greco and Thomas Adam Bartush. Their collaboration has contributed to the development of advanced technologies in their field.
Conclusion
Garth A Brooks is a distinguished inventor whose work in chemical mechanical polishing has made a significant impact on the semiconductor industry. His innovative patents and contributions continue to shape the future of technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile