Company Filing History:
Years Active: 1984-1987
Title: The Innovative Contributions of Garrett A. Garrettson
Introduction
Garrett A. Garrettson is a notable inventor based in Los Altos Hills, California. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on advancements in photolithography and lithographic processing.
Latest Patents
One of Garrettson's latest patents is the "Capacitive Mask Aligner." This innovative aligner is designed for aligning a mask and a wafer during the photolithography process of semiconductor chips. It utilizes the detection of differential capacitance between conductive fingers on the mask and ridges on the wafer. An A.C. signal is coupled between these components, allowing for precise detection of phase or amplitude signals. The aligner can achieve rotational alignment or two-axis lateral alignment through multiple groups of ridges and fingers. Additionally, it features reference ledges that enable capacitive coupling even when the distance between the mask and wafer is significant.
Another significant patent is the "Method and Apparatus for Lithographic Rotate and Repeat Processing." This X-ray lithography apparatus allows for the successive exposure of each quadrant of a semiconductor wafer using a single mask. The mask overlays one quadrant at a time, and the wafer is rotated after each exposure to align with the next quadrant. This method ensures that each section of the wafer is independently aligned to the mask before exposure, enhancing the efficiency of the lithographic process.
Career Highlights
Garrettson has had a distinguished career, working with prominent companies such as Hewlett-Packard Company and Varian Associates, Inc. His experience in these organizations has contributed to his expertise in semiconductor technology and innovation.
Collaborations
Throughout his career, Garrettson has collaborated with notable individuals, including Armand P. Neukermans and James H. Boyden. These collaborations have further enriched his work and contributions to the field.
Conclusion
Garrett A. Garrettson's innovative patents and career achievements highlight his significant impact on semiconductor technology. His work continues to influence advancements in the industry, showcasing the importance of innovation in driving progress.