Location History:
- Rockport, MA (US) (2020)
- Hillsboro, OR (US) (2020 - 2022)
Company Filing History:
2 out of 13,713 
1 out of 916 
Years Active: 2020-2022
Title: Gang Shu: Innovator in Optical Metrology
Introduction
Gang Shu, a prominent inventor based in Hillsboro, Oregon, has made significant contributions to the field of optical metrology, particularly focusing on ion beam technologies. With a total of three patents to his name, he has demonstrated a strong commitment to advancing innovation in this specialized area.
Latest Patents
Among Gang Shu's notable inventions is a patent titled "System and Method for Spatially Resolved Optical Metrology of an Ion Beam." This invention provides systems and methods designed for the precise measurement of light signals from ion beams interacting with wafers. The system includes a chamber equipped with a plasma/ion source to deliver an ion beam, coupled with an optical collection module for capturing light signals from a specific volume of the ion beam. Furthermore, it features a detection module that processes the measured light signals, generating electric signals that correlate with the properties of the sampled plasma volume. This innovation holds significant potential for enhancing measurement accuracy in various applications.
Career Highlights
Gang Shu has had an impressive career, having contributed his expertise to industry leaders such as Applied Materials, Inc. and Varian Semiconductor Equipment Associates, Inc. His work in these organizations has helped shape the development of advanced semiconductor manufacturing processes and technologies.
Collaborations
Throughout his professional journey, Gang has collaborated with esteemed colleagues, including Glen Gilchrist and Shurong Liang, who have also played vital roles in advancing their respective fields. These collaborations have been instrumental in fostering innovative ideas and solutions.
Conclusion
In summary, Gang Shu stands out as a leading inventor in the realm of optical metrology and ion beam technology. His patented inventions not only reflect his technical expertise but also his desire to push the boundaries of scientific discovery. With ongoing contributions to the industry, he continues to inspire future innovations in optical measurement and semiconductor technologies.