This inventor holds 2 USPTO granted patents and 1 published patent application and 1 EPO patent. Top assignee: Ebara Corporation. Active years: 2024-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2024-2025
Title: Fumiya Okazaki: Innovator in Vacuum Technology
Introduction
Fumiya Okazaki is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of vacuum technology, holding a total of 2 patents. His innovative work focuses on improving the efficiency and effectiveness of vacuum pumps and substrate drying processes.
Latest Patents
Okazaki's latest patents include a product removal apparatus, treatment system, and product removal method. This invention provides a solution for effectively removing products deposited inside a vacuum pump while minimizing corrosion of the pump's base material. The apparatus features a sensor that measures the temperature inside the vacuum pump, the thickness of the product film, or the vibration frequency of the pump. Additionally, it includes a gas supplier that introduces gases such as hydrogen halide, fluorine, chlorine, or fluorine radicals to enhance the removal process. The control device intelligently manages the gas supply based on the measured parameters.
Another notable patent is the substrate drying apparatus. This device is designed to grip the outer periphery of a square substrate and utilizes a substrate nozzle to eject gas for drying. The gripping part nozzle also plays a crucial role in ensuring the substrate is thoroughly dried by ejecting gas in a different direction. This innovative design allows for efficient drying of substrates in various applications.
Career Highlights
Fumiya Okazaki is currently employed at Ebara Corporation, a leading company in the field of vacuum technology. His work at Ebara has allowed him to develop and refine his inventions, contributing to advancements in the industry.
Collaborations
Okazaki collaborates with talented coworkers, including Hirotaka Ohashi and Takuya Tsushima. Their combined expertise fosters a creative environment that drives innovation and enhances the development of new technologies.
Conclusion
Fumiya Okazaki's contributions to vacuum technology through his patents and work at Ebara Corporation highlight his role as a key innovator in the field. His inventions not only improve existing processes but also pave the way for future advancements in vacuum systems.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile