Fuhe Sun

Title: Fuhe Sun: Innovator in MEMS Microphone Technology

Introduction

Fuhe Sun is a notable inventor based in Hangzhou, China. He has made significant contributions to the field of micro-electromechanical systems (MEMS), particularly in the development of MEMS microphones. His innovative approach has led to advancements in audio technology.

Latest Patents

Fuhe Sun holds a patent for a MEMS microphone and its manufacturing method. The patent describes a method that involves sequentially forming a first isolation layer, a diaphragm, and a second isolation layer on a substrate. It further details the formation of a first protective layer, a backplate electrode, and a second protective layer on the second isolation layer. The method includes creating a release hole that penetrates through these layers, forming an acoustic cavity that penetrates through the substrate, and releasing the diaphragm through the acoustic cavity and the release hole. Additionally, a groove is formed on the surface of the first isolation layer, allowing the diaphragm to conformally cover it, thereby creating a spring structure at the groove's position.

Career Highlights

Fuhe Sun has worked with prominent companies in the semiconductor industry, including Hangzhou Silan Integrated Circuit Co., Ltd. and Hangzhou Silan Microelectronics Co., Ltd. His experience in these organizations has contributed to his expertise in MEMS technology and innovation.

Collaborations

Fuhe Sun has collaborated with notable colleagues such as Yongxiang Wen and Chen Liu. Their combined efforts have furthered advancements in the field of MEMS and audio technology.

Conclusion

Fuhe Sun's contributions to MEMS microphone technology exemplify his innovative spirit and dedication to advancing audio technology. His patent and career achievements highlight his role as a significant inventor in this field.