Hangzhou Silan Microelectronics Co., Ltd.

Hangzhou Silan Integrated Circuit Co., Ltd.

Fuhe Sun

Chen Liu

Yongxiang Wen

Wenliang Sun

Wenchao Jin

A MEMS microphone and a manufacturing method thereof. The method comprises: sequentially forming a first isolation layer, a diaphragm, and a second isolation layer on a substrate; sequentially forming a first protective layer, a backplate electrode, and a second protective layer on the second isolation layer; forming a release hole penetrating through the first protective layer, the backplate electrode, and the second protective layer; forming an acoustic cavity penetrating through the substrate; releasing the diaphragm through the acoustic cavity and the release hole; and forming a groove on a surface of the first isolation layer, wherein the diaphragm conformally covers the surface of the first isolation layer, thereby forming a spring structure at a position of the groove.

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Hangzhou, China

Fuhe Sun