Location History:
- Tainan, TW (2004)
- Siogying, TW (2006)
Company Filing History:
Years Active: 2004-2006
Title: Fu-Su Lee: Innovator in Semiconductor Technology
Introduction
Fu-Su Lee is a prominent inventor based in Tainan, Taiwan, known for his contributions to semiconductor technology. He holds three patents that showcase his innovative approach to improving semiconductor processing and measurement techniques. His work has significantly impacted the efficiency and accuracy of semiconductor manufacturing.
Latest Patents
One of Fu-Su Lee's latest patents is a method for calibrating alignment mark positions on substrates. This novel method determines whether substrates are correctly positioned on a substrate support in semiconductor processing tools. It involves providing a control substrate with alignment marks, determining a homing position for these marks, and periodically testing the position to ensure it remains within an accepted deviation range.
Another significant patent is related to metrology for monitoring a rapid thermal annealing process. This method includes operating an ion implant to implant ions in a semiconductor wafer, performing thermal wave measurements, and comparing the results to a target range. If the measurements fall outside the acceptable specification, the wafer is rejected, ensuring high-quality semiconductor production.
Career Highlights
Fu-Su Lee is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise in semiconductor processing has made him a valuable asset to the company. His innovative methods have contributed to advancements in the field, enhancing the overall quality of semiconductor products.
Collaborations
Fu-Su Lee collaborates with talented individuals such as Ching-Shan Lu and Juin-Jie Chang. Their teamwork fosters an environment of innovation and creativity, leading to groundbreaking developments in semiconductor technology.
Conclusion
Fu-Su Lee's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of semiconductor manufacturing, ensuring high standards and efficiency in production.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.