Mohnton, PA, United States of America

Franklin Roy Dietz


Average Co-Inventor Count = 5.5

ph-index = 2

Forward Citations = 17(Granted Patents)


Company Filing History:


Years Active: 2000-2002

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3 patents (USPTO):Explore Patents

Title: Franklin Roy Dietz: Innovator in Thin Film Technology

Introduction

Franklin Roy Dietz is a notable inventor based in Mohnton, PA (US), recognized for his contributions to thin film technology. He holds a total of 3 patents, showcasing his innovative approach to optical profilometry and wafer thinning processes.

Latest Patents

Dietz's latest patents include a method of thin film process control and calibration standard for optical profilometry step height measurement. This method involves calibrating an interferometer system and a multilayer thin film used for this calibration. The multilayer thin film comprises a gold layer that defines a gold step, with a detailed structure that includes an optical flat and various layers. Another significant patent is for an in-situ automated contactless thickness measurement system for wafer thinning. This system integrates an optical reflectometer into a wafer thinning apparatus, allowing for real-time thickness measurements while preventing damage to the wafers.

Career Highlights

Throughout his career, Dietz has worked with prominent companies such as Lucent Technologies Inc. and Agere Systems. His experience in these organizations has contributed to his expertise in the field of optical technologies and thin film processes.

Collaborations

Dietz has collaborated with notable individuals in his field, including David Gerald Coult and Gustav Edward Derkits, Jr. These collaborations have likely enriched his work and led to advancements in his innovative projects.

Conclusion

Franklin Roy Dietz's work in thin film technology and optical measurement systems has made a significant impact in his field. His patents reflect a commitment to innovation and precision in technology.

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