Company Filing History:
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1 out of 1 Years Active: 1976-1985
Title: Innovations by Frank H Spooner: A Pioneer in Semiconductor Fabrication
Introduction
Frank H Spooner, an accomplished inventor based in Concord, MA, is known for his significant contributions to the field of semiconductor technology. With a total of four patents to his name, Spooner has specialized in innovative fabrication processes that enhance the performance and efficiency of semiconductor devices.
Latest Patents
Among Spooner's latest patents is the "Deep Mesa Process for Fabricating Monolithic Integrated Schottky Barrier." This method focuses on the fabrication of gallium arsenide devices and utilizes a deep mesa step structure for contact isolation. The technique ensures improved step coverage of deposited conductive films through preferential orientation of the non-centrosymmetric crystal substrate, combined with wet anisotropic etching to achieve a sloped step. The innovative photolithographic process addresses challenges in fine line definition of the Schottky anode contact, utilizing a two-step exposure method that optimizes resist profiles for effective lift-off of unwanted metal. Additionally, Spooner has developed methods for "Selective Epitaxial Growth of Gallium Arsenide with Selective Orientation," which allows for the precise fabrication of semiconductor devices on semi-insulating GaAs substrates, overcoming issues of random growth and poor surface morphology through strategic etching and dielectric use.
Career Highlights
Frank H Spooner has had a distinguished career, having contributed to technology giants such as Sperry Corporation and Raytheon Company. His work at these companies has allowed him to pioneer several innovative techniques that have become fundamental in semiconductor fabrication.
Collaborations
Throughout his career, Spooner has collaborated with notable coworkers including Charles R Snider and Charles B Willingham. Their combined expertise and innovative spirit have undoubtedly contributed to the advancements in technology that Spooner’s patents represent.
Conclusion
Frank H Spooner stands out as a key figure in semiconductor innovation, with significant patents that have reshaped fabrication processes. His work not only reflects his expertise but also his relentless pursuit of technological advancement in the field of gallium arsenide devices. As he continues to influence the industry, his contributions serve as a pivotal part of the ongoing evolution of semiconductor technology.