This inventor holds 6 USPTO granted patents. Top assignee: Lsi Logic Corporation. Active years: 1995-2000.
Location History:
- Wettingen, CH (1995 - 1996)
- San Jose, CA (US) (1995 - 2000)
Company Filing History:
Years Active: 1995-2000
Title: Frank Bose: Innovator in Plasma Technology
Introduction
Frank Bose is a notable inventor based in San Jose, California. He has made significant contributions to the field of semiconductor processing, holding a total of 6 patents. His work focuses on innovative methods for producing plasma, which is essential for various applications in semiconductor manufacturing.
Latest Patents
Among his latest patents is the "Plasma Initiating Assembly," which describes an apparatus designed to produce plasma suitable for semiconductor processing at low millitorr pressures. This apparatus features a vacuum chamber with a dielectric window and a planar coil that is positioned adjacent to the window. The coil is coupled to a power source, while a plasma initiator is located within the chamber. Once the plasma is initiated, the planar coil sustains it through inductive power coupling. In one embodiment, the plasma initiator is a secondary electrode connected to a second RF power source. Additionally, the patent outlines various methods for ionizing the process gas, including the use of ultraviolet light sources, lasers, and high voltage power sources.
Another significant patent is the "Method for Igniting Low Pressure Inductively Coupled Plasma," which shares similar features and functionalities with the plasma initiating assembly. This invention also emphasizes the importance of the vacuum chamber, dielectric window, and inductive power coupling in sustaining the plasma for semiconductor applications.
Career Highlights
Frank Bose has built a successful career at LSI Logic Corporation, where he has been instrumental in advancing plasma technology. His innovative approaches have not only contributed to the company's success but have also influenced the broader semiconductor industry.
Collaborations
Throughout his career, Frank has collaborated with talented individuals such as Roger Patrick and Philippe Schoenborn. These partnerships have fostered a creative environment that has led to groundbreaking advancements in plasma technology.
Conclusion
Frank Bose's contributions to plasma technology and semiconductor processing are noteworthy. His innovative patents and collaborative efforts have significantly impacted the industry, showcasing his expertise and dedication to advancing technology.