Fengyan Wei

Title: Innovations of Fengyan Wei in Remote Plasma Processing

Introduction

Fengyan Wei is a notable inventor based in Meridian, ID (US). He has made significant contributions to the field of semiconductor processing, particularly through his innovative patent related to remote plasma deposition.

Latest Patents

Fengyan Wei holds a patent for a "Remote plasma deposition with electrostatic clamping." This invention involves a remote plasma processing apparatus equipped with an electrostatic chuck that facilitates the deposition of films on semiconductor substrates using atomic layer deposition or chemical vapor deposition. The apparatus includes a remote plasma source and a reaction chamber positioned downstream from the plasma source. An RF power source is utilized to apply high RF power to the remote plasma source, while heating elements are designed to apply high temperatures to the electrostatic chuck. The semiconductor substrate can be dechucked from the electrostatic chuck through a declamping routine that alternates reversing polarities and reducing clamping voltages. In certain embodiments, silicon nitride film can be conformally deposited by atomic layer deposition using a mixture of nitrogen, ammonia, and hydrogen gases as a source gas for remote plasma generation. Fengyan Wei's innovative approach enhances the efficiency and effectiveness of semiconductor manufacturing processes.

Career Highlights

Fengyan Wei is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work focuses on advancing technologies that improve the fabrication of semiconductor devices. With his expertise, he has contributed to the development of cutting-edge solutions that address the challenges faced in semiconductor processing.

Collaborations

Fengyan Wei collaborates with talented professionals in his field, including Jon Henri and Bradley Taylor Streng. These collaborations foster an environment of innovation and creativity, leading to advancements in semiconductor technology.

Conclusion

Fengyan Wei's contributions to remote plasma processing exemplify the importance of innovation in the semiconductor industry. His patent and work at Lam Research Corporation highlight his commitment to advancing technology and improving manufacturing processes.