Company Filing History:
1 out of 10 
1 out of 3 Years Active: 1997
Title: The Innovations of Feng Shi
Introduction
Feng Shi is a notable inventor based in Kassel, Germany. He has made significant contributions to the field of micromechanical sensors and lithography through his innovative work. His expertise in silicon membrane technology has paved the way for advancements in various applications.
Latest Patents
Feng Shi holds a patent for a silicon membrane and method of making the same. This invention involves fabricating a silicon membrane for use as a micromechanical sensor or as a mask for projection lithography. The process includes doping a silicon wafer to different thicknesses at various portions and then electrochemically etching away the undoped portion of the wafer. This innovative approach enhances the functionality and efficiency of micromechanical devices.
Career Highlights
Throughout his career, Feng Shi has worked with prominent organizations such as Ims-Ionen Mikrofabrikations Systeme GmbH and Universität Gesamthochschule Kassel. His experience in these institutions has allowed him to collaborate with leading experts in the field and contribute to groundbreaking research.
Collaborations
Feng Shi has collaborated with notable colleagues, including Hans Loschner and Ivaylo W. Rangelow. Their combined expertise has fostered an environment of innovation and creativity, leading to advancements in micromechanical technologies.
Conclusion
Feng Shi's contributions to the field of silicon membrane technology exemplify his dedication to innovation and research. His patent and collaborations highlight the importance of teamwork in advancing technology. His work continues to influence the development of micromechanical sensors and lithography applications.