Location History:
- Cupertino, CA (US) (2007)
- Sunnyvale, CA (US) (2010)
Company Filing History:
Years Active: 2007-2010
Title: Innovations by Feng-Hong Zhang in Semiconductor Technology
Introduction
Feng-Hong Zhang is a notable inventor based in Sunnyvale, CA, specializing in semiconductor technology. He has made significant contributions to the field, holding 2 patents that focus on advanced photolithography techniques. His work is crucial for enhancing the efficiency and accuracy of semiconductor manufacturing processes.
Latest Patents
Zhang's latest patents include innovative methods for inspecting and optionally reworking summed photolithography patterns resulting from plurally-overlaid patterning steps during mass production of semiconductor devices. This method involves temporarily stalling a batch of wafers during a Double Pattern Technology (DPT) process. A temporary representation of a second of to-be-overlaid patterns is combined with a first pattern. The stalled wafers are inspected to ensure proper alignment between the two patterns. If excessive misalignment is detected, the temporary pattern representation is erased, and the batch is routed for rework.
Another significant patent focuses on providing representative features for use in the inspection of photolithography masks and photo-lithographically developed wafer layers. This method defines critically representative features (CRFs) for mask-making verification and resist development verification. The placement of mask-CRFs in the wafer CD bar region addresses the challenge of locating mask-CRFs at different positions in the in-die areas of a manufactured mask. On-wafer counterparts of the mask-CRFs can be utilized for fine-tuning lithography and patterning processes.
Career Highlights
Feng-Hong Zhang is currently employed at Promos Technologies, Inc., where he continues to innovate in the semiconductor field. His expertise and contributions have positioned him as a key figure in advancing photolithography techniques.
Collaborations
Zhang collaborates with talented coworkers, including Limin (Eric) Lou and Xinyu Zhang, who contribute to the innovative environment at Promos Technologies, Inc.
Conclusion
Feng-Hong Zhang's work in semiconductor technology exemplifies the importance of innovation in enhancing manufacturing processes. His patents reflect a commitment to improving the efficiency and accuracy of photolithography, making significant strides in the industry.