Farid Atry

Title: Farid Atry: Innovator in EUV Technology

Introduction

Farid Atry is a notable inventor based in San Jose, California. He has made significant contributions to the field of extreme ultraviolet (EUV) technology. His innovative work has led to the development of a patent that enhances the capabilities of EUV tools.

Latest Patents

Farid Atry holds a patent titled "In-situ in-band and out-of-band spectral measurement for EUV tools." This invention involves a substrate mounted on a chuck within a chamber of an EUV tool. The design includes an illumination aperture that provides a beam of light to illuminate the substrate. This beam consists of extreme ultraviolet (EUV) in-band (IB) light and out-of-band (OOB) light, with the latter having longer wavelengths than the EUV IB light. The invention features a beam-narrowing aperture that selectively narrows the beam of light to illuminate the substrate. Additionally, a band-selection filter is employed to filter out either the OOB light or the EUV IB light. The imaging optics relay light from the substrate to an imaging plane, where a grating spectrally disperses the light. A sensor then detects the light from the substrate, relayed by the imaging optics and spectrally dispersed by the grating. Farid Atry has 1 patent to his name.

Career Highlights

Farid Atry is currently employed at Kla Corporation, a company known for its advanced semiconductor manufacturing equipment. His work at Kla Corporation focuses on enhancing the performance and accuracy of EUV tools, which are critical in the production of next-generation semiconductor devices.

Collaborations

Farid collaborates with talented professionals in his field, including Rajeev Rajendran and Michael Xie. These collaborations contribute to the innovative environment at Kla Corporation, fostering advancements in EUV technology.

Conclusion

Farid Atry is a prominent inventor whose work in EUV technology has the potential to significantly impact the semiconductor industry. His patent demonstrates a commitment to innovation and excellence in his field.