Fangren Ji

Title: Innovations of Fangren Ji in Semiconductor Manufacturing

Introduction

Fangren Ji is a notable inventor based in Austin, TX, who has made significant contributions to the field of semiconductor manufacturing. With a total of two patents to his name, his work focuses on improving measurement techniques in the manufacturing process.

Latest Patents

Fangren Ji's latest patents include a method and system for measuring overlay error using a device inspection system. This innovative approach involves capturing an image of a feature in an article at a predetermined manufacturing stage. The process derives a quantity of an image parameter from the image and converts this quantity into an overlay measurement. The conversion is referenced against an image parameter quantity derived from a reference image of a feature at the same manufacturing stage with known overlay (OVL). Additionally, the patent discloses a method for determining a device inspection recipe for use by an inspection tool. This method includes identifying device patterns as candidate device care areas sensitive to OVL, deriving an OVL response for each identified pattern, correlating the OVL response with measured OVL, and selecting some or all of the device patterns as device care areas based on the correlation.

Career Highlights

Fangren Ji is currently employed at Kla Tencor Corporation, where he applies his expertise in semiconductor technology. His work has been instrumental in advancing the methodologies used in the industry.

Collaborations

Fangren Ji has collaborated with notable colleagues such as Choon Hoong Hoo and Amnon Manassen, contributing to a dynamic work environment that fosters innovation.

Conclusion

Fangren Ji's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the industry and improve manufacturing processes.