Faisal Azam

Title: Innovations by Faisal Azam in Overlay Shift Determination

Introduction

Faisal Azam is an accomplished inventor based in Fishkill, NY (US), known for his contributions to the field of integrated circuit measurement. With a total of two patents to his name, he has made significant advancements in overlay shift determination technologies.

Latest Patents

Faisal Azam's latest patents include innovative systems and methods for overlay shift determination. One of his patents describes a method for measuring misalignment between at least two layers of an integrated circuit. This method involves applying a current between a plurality of probe members in a first layer, where specific probe members are aligned along a first axis and partially overlap an overlay target in a second layer. The process includes measuring voltages across the probe members to determine the amount of misalignment between the layers along specified axes.

Another patent focuses on systems and methods that enable the determination of the magnitude and direction of overlay between elements in two layers. This invention allows for overlay measurements along two axes using four probe pads without the need for a decoder. Additionally, measurements along a single axis can be obtained using three probe pads, making the systems more space-efficient and time-efficient compared to conventional measurement structures. The methods also calculate offsets in a direction based on resistance measurements.

Career Highlights

Faisal Azam is currently employed at International Business Machines Corporation (IBM), where he continues to innovate and develop new technologies in the field of integrated circuits. His work has contributed to enhancing the accuracy and efficiency of overlay measurements, which are critical in semiconductor manufacturing.

Collaborations

Faisal has collaborated with notable coworkers, including Patricia Argandona and Andrew Lu, who have contributed to his projects and innovations.

Conclusion

Faisal Azam's work in overlay shift determination represents a significant advancement in integrated circuit technology. His patents reflect a commitment to improving measurement techniques, which are essential for the future of semiconductor manufacturing.