Evelio Sevillano

Title: The Innovative Contributions of Evelio Sevillano

Introduction

Evelio Sevillano is a notable inventor based in Danville, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of 4 patents. His work focuses on enhancing the efficiency and accuracy of semiconductor manufacturing processes.

Latest Patents

One of Sevillano's latest patents is titled "Using identifiers to map edge ring part numbers onto slot numbers." This invention involves methods and systems for tracking an edge ring, which includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, and the identifier is tracked to determine transfers into and out of the edge ring carrier and processing station. This tracking builds a metadata file that provides lifetime information regarding the edge ring.

Another significant patent is "Methods for detecting endpoint for through-silicon via reveal applications." This invention includes systems and methods for processing a semiconductor wafer within a plasma processing chamber. The chamber features a camera mounted to a viewport, which captures images of emerging patterns. The images are processed using pattern recognition logic to detect a match with a reference pattern, generating a signal that defines an endpoint for the etching operation.

Career Highlights

Evelio Sevillano is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has allowed him to contribute to advancements in semiconductor technology, making processes more efficient and reliable.

Collaborations

Throughout his career, Sevillano has collaborated with talented individuals such as Alan Jeffrey Miller and Jorge Luque. These collaborations have fostered innovation and have led to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Evelio Sevillano's contributions to semiconductor processing through his patents and work at Lam Research Corporation highlight his role as an influential inventor in the field. His innovative solutions continue to impact the industry positively.