The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Aug. 30, 2018
Lam Research Corporation, Fremont, CA (US);
Evelio Sevillano, Danville, CA (US);
Thomas Chang, Mountain View, CA (US);
Robert O'Donnell, Fremont, CA (US);
Ronda Ropes, Alameda, CA (US);
Peter R. Wassei, Newberg, OR (US);
Bridget Hill, Villach, AT;
Lam Research Corporation, Fremont, CA (US);
Abstract
Methods and systems for tracking an edge ring includes capturing an edge ring identifier from a source related to the edge ring. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is being assigned to the edge ring carrier. The edge ring identifier is tracked to determine transfers into and out of the edge ring carrier and into and out of a processing station. The tracking of the edge ring identifier builds a metadata file that provides lifetime information regarding the edge ring.