This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Eun Seok Seo and Semiconductor Substrate Processing
Introduction
Eun Seok Seo is an inventor associated with Gwangmyeong, South Korea, and Samsung Electronics Ltd. The supplied information lists 1 patent in her name, focused on semiconductor substrate processing.
Latest Patents
Seo’s listed patent, “Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same,” describes an apparatus with a heater divided into two units within a support plate. During the transient section—before the substrate reaches a steady-state temperature—processing circuitry controls the units to heat different substrate portions to different temperatures. The patent also concerns methods of manufacturing semiconductor devices using the apparatus.
Career Highlights
The available information connects Seo’s invention to Samsung Electronics Ltd. Her listed patent addresses temperature control during substrate processing, a step relevant to semiconductor device manufacturing.
Collaborations
Jae Hong Lim and Young Ho Hwang are identified as Seo’s coworkers. The supplied information does not specify their roles in the patent or the invention.
Conclusion
Eun Seok Seo’s listed patent presents a semiconductor processing approach that uses independently controlled heater units to apply different temperatures across a substrate during transient heating.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile