Erno Klaassen

Title: Erno Klaassen: Innovator in MEMS Technology

Introduction

Erno Klaassen, based in Sunnyvale, California, is an influential inventor in the field of micro-electromechanical systems (MEMS), holding a total of five patents. His groundbreaking work has significantly advanced the development of microsensors, particularly those employing fixed parallel plate configurations.

Latest Patents

Klaassen's recent patents focus on a fixed parallel plate MEMS capacitor microsensor array. This innovative design allows a dissolved dielectric to flow through a porous top plate, eventually resting on a bottom plate. To ensure purity and uniformity of the dielectric layer, a post-deposition bake is utilized. One embodiment of the technology incorporates a polymer dielectric, while another features a support layer to strengthen the sensor. Additionally, the design includes a dual-layered bottom plate for a narrowed gap, facilitating the creation of integrated circuit arrays with multiple microwat devices. These devices are strategically separated by physical barriers, such as a polycrystalline containment rim or trough, to prevent cross-interference among the sensors.

Career Highlights

Erno Klaassen’s contributions to the field of MEMS technology have not only culminated in multiple patents but also established him as a key figure at Xsilogy Inc. His work aims to push the boundaries of sensor technology, offering innovative solutions that leverage advanced materials and fabrication techniques.

Collaborations

During his tenure at Xsilogy Inc., Klaassen has collaborated with talented professionals, including Sanjay V. Patel and Bernd Fruhberger. These partnerships have further enriched his research and development endeavors, leading to more robust and versatile sensor designs.

Conclusion

Erno Klaassen stands out as a prominent inventor whose work in MEMS technology continues to foster innovation within the industry. His patents not only illustrate his expertise but also reflect a commitment to advancing the capabilities of microsensors. As technology evolves, Klaassen's contributions will undoubtedly play a crucial role in shaping the future of sensor applications.