The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Mar. 20, 2007
Sanjay V. Patel, San Diego, CA (US);
Bernd Fruhberger, Encinitas, CA (US);
Erno Klaassen, Sunnyvale, CA (US);
Todd E. Mlsna, Carlsbad, CA (US);
David R. Baselt, San Diego, CA (US);
Sanjay V. Patel, San Diego, CA (US);
Bernd Fruhberger, Encinitas, CA (US);
Erno Klaassen, Sunnyvale, CA (US);
Todd E. Mlsna, Carlsbad, CA (US);
David R. Baselt, San Diego, CA (US);
Xsilogy Inc., San Diego, CA (US);
Abstract
A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.