Bernd Fruhberger

Title: Bernd Fruhberger: Innovator in MEMS Technology

Introduction

Bernd Fruhberger is a notable inventor based in Encinitas, California. He has made significant contributions to the field of micro-mechanical systems (MEMS) technology. With a total of 6 patents to his name, Fruhberger's work focuses on advancing sensor technology.

Latest Patents

Fruhberger's latest patents include the development of a fixed parallel plate MEMS capacitor microsensor array. This innovative sensor is designed to allow a dissolved dielectric to flow through a porous top plate, settling on a bottom plate. A post-deposition bake is utilized to enhance the purity and uniformity of the dielectric layer. In one embodiment, the dielectric material is a polymer. Additionally, a support layer can be deposited onto the top plate to strengthen the sensor. Another embodiment features a dual-layered bottom plate that narrows the gap between the plates. Integrated circuit arrays of these sensors can be created, with multiple devices separated by a physical barrier, such as a polycrystalline containment rim or trough, to prevent interference between sensors.

Career Highlights

Fruhberger is currently employed at Xsilogy Inc., where he continues to push the boundaries of MEMS technology. His work has garnered attention for its innovative approach to sensor design and fabrication.

Collaborations

Throughout his career, Fruhberger has collaborated with notable colleagues, including David R Baselt and Sanjay V Patel. These partnerships have contributed to the advancement of his research and development efforts.

Conclusion

Bernd Fruhberger is a prominent figure in the field of MEMS technology, with a focus on developing advanced sensor systems. His contributions through his patents and collaborations highlight his commitment to innovation in this critical area of technology.