Company Filing History:
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Years Active: 2000
Title: Eng Hwa Lim: Innovator in Semiconductor Technology
Introduction
Eng Hwa Lim is a notable inventor based in Singapore, recognized for his contributions to semiconductor technology. He holds a patent that showcases his expertise in fabricating advanced gate electrodes for deep sub-micron CMOS technology. His innovative approach has implications for the efficiency and performance of electronic devices.
Latest Patents
Eng Hwa Lim's patent, titled "Ultra-low sheet resistance metal/poly-si gate for deep sub-micron CMOS," presents a method for creating a gate electrode that combines polysilicon and metal, achieving ultra-low sheet resistance. The process involves several intricate steps, including the formation of shallow trench isolation regions in a silicon substrate, the deposition of a gate oxide layer, and the creation of a doped blanket polysilicon layer. The method further details the patterning of the polysilicon and silicon nitride layers to form the gate electrode and cap, followed by the formation of source/drain areas and the deposition of a barrier layer. This innovative technique enhances the performance of CMOS devices, making it a significant advancement in the field.
Career Highlights
Eng Hwa Lim has worked with prominent organizations, including Chartered Semiconductor Manufacturing Ltd and the National University of Singapore. His experience in these institutions has allowed him to collaborate with leading experts in the field and contribute to groundbreaking research and development in semiconductor technology.
Collaborations
Eng Hwa Lim has collaborated with notable colleagues, including Chong Wee Lim and Kin Leong Pey. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Eng Hwa Lim's contributions to semiconductor technology through his patent and career achievements highlight his role as an influential inventor in the industry. His work continues to impact the development of advanced electronic devices, showcasing the importance of innovation in technology.