This inventor holds 4 USPTO granted patents. Top assignee: United Microelectronics Corp.. Active years: 1998-2000.
Company Filing History:
Years Active: 1998-2000
Title: En-Tien Tan: Innovator in Dispensing Systems
Introduction
En-Tien Tan is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of dispensing systems, particularly in the semiconductor industry. With a total of 4 patents to his name, Tan's work focuses on enhancing the efficiency and functionality of coating machines.
Latest Patents
Tan's latest patents include a "Dispensing System of a Coater" and a "Dispense System of a Photoresist Coating Machine." The dispensing system used in a spin coater is designed to transport solvents to wafers. This system incorporates a switch valve, a sucking-back valve, a solenoid valve, and speed control units for both the switch and sucking-back valves. The switch valve manages the solvent dispensing status, while the sucking-back valve exports the solvent to the wafer. The solenoid valve controls the operation of both valves, ensuring precise control over the dispensing process.
In his photoresist dispensing system, Tan has developed a mechanism that includes a pump, sucking-back valve, and solenoid valve. This system is responsible for transporting photoresist and spraying it onto substrates. The sucking-back valve effectively manages the liquid photoresist, creating a sucking force when the pump is inactive and releasing it when the pump is activated. This innovative design enhances the overall efficiency of photoresist application in semiconductor manufacturing.
Career Highlights
En-Tien Tan is currently employed at United Microelectronics Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in improving the performance of coating machines, which are critical in the production of semiconductor devices.
Collaborations
Tan collaborates with esteemed colleagues such as Ming-Che Yang and Kuo-Feng Huang. Their combined expertise contributes to the advancement of technology in their field.
Conclusion
En-Tien Tan's contributions to dispensing systems have made a significant impact on the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in technology.