Barberaz, France

Emmanuel Guidotti



Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 26(Granted Patents)


Company Filing History:


Years Active: 2000

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2 patents (USPTO):Explore Patents

Title: Emmanuel Guidotti: Innovator in Surface Morphology and Chemical Vapor Deposition

Introduction

Emmanuel Guidotti is a notable inventor based in Barberaz, France. He has made significant contributions to the field of material science, particularly in the area of surface morphology and chemical vapor deposition. With a total of two patents to his name, Guidotti's work has implications for various industries, including semiconductor manufacturing.

Latest Patents

Guidotti's latest patents include a method of improving surface morphology and reducing resistivity. This innovative method involves producing a thick metal film on a substrate surface that exhibits a substantially smooth surface morphology and low resistivity. The process begins with exposing a substrate to plasma, followed by the deposition of a first thin metal film via chemical vapor deposition. The substrate, now with the deposited film, is again exposed to plasma, allowing for the deposition of a second thin metal film on top of the first. This cycle can be repeated until the desired film thickness is achieved, resulting in a film characterized by a smooth surface and low resistivity.

Another significant patent by Guidotti is a method of eliminating edge effects in chemical vapor deposition of metals, such as copper, on semiconductor substrate surfaces. In this method, a susceptor within a reaction chamber is exposed to plasma, ensuring that the substrate processed by chemical vapor deposition has a uniform metal layer across both edge and non-edge surfaces. This technique allows for the processing of multiple substrates before the susceptor needs to be re-exposed to plasma.

Career Highlights

Throughout his career, Emmanuel Guidotti has worked with prominent companies, including Tokyo Electron Limited and IBM. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in his field.

Collaborations

Guidotti has collaborated with several professionals in his field, including Chantal Arena and Ronald T. Bertram. These collaborations have likely enriched his work and led to further innovations.

Conclusion

Emmanuel Guidotti stands out as an influential inventor in the realm of surface morphology and chemical vapor deposition. His patents reflect a commitment to advancing technology and improving manufacturing processes. His contributions continue to impact the semiconductor industry and beyond.

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