Company Filing History:
Years Active: 2011-2014
Title: Innovations by Elizabeth Apen
Introduction
Elizabeth Apen is a notable inventor based in West Linn, OR (US). She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her work focuses on enhancing the performance and reliability of integrated circuits through innovative materials and methods.
Latest Patents
One of her latest patents involves the development of diffusion barrier and etch stop films. These films, characterized by high hermeticity and low dielectric constant, serve multiple purposes in integrated circuit fabrication. They protect underlying layers from atmospheric moisture and oxygen, preventing undesirable oxidation and moisture absorption. Specifically, Apen's bi-layer film consists of a hermetic bottom layer made of hydrogen-doped carbon and a low-k top layer of silicon carbide. This film can be deposited using PECVD methods on semiconductor substrates.
Another significant patent addresses the reduction of UV and dielectric diffusion barrier interaction. Apen's methods stabilize the underlying dielectric diffusion barrier during the deposition and UV processing of overlying dielectric layers. By modulating the optical properties, her techniques minimize the effects of UV radiation on the dielectric diffusion barrier, enhancing the overall performance of semiconductor devices.
Career Highlights
Elizabeth Apen has built a successful career at Novellus Systems Incorporated, where she has been instrumental in advancing semiconductor technologies. Her innovative approaches have led to the development of critical materials that improve the efficiency and reliability of integrated circuits.
Collaborations
Throughout her career, Apen has collaborated with esteemed colleagues, including Yongsik Yu and Pramod Subramonium. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Elizabeth Apen's contributions to semiconductor technology through her patents and collaborative efforts highlight her role as a leading inventor in her field. Her work continues to influence the development of advanced materials for integrated circuits, ensuring enhanced performance and reliability in electronic devices.