Company Filing History:
Years Active: 2016-2018
Title: Elisha Tam: Innovator in Semiconductor Technology
Introduction
Elisha Tam is a notable inventor based in Saratoga, CA (US). He has made significant contributions to the field of semiconductor processing, holding 2 patents that showcase his innovative approach to technology.
Latest Patents
One of Elisha's latest patents is focused on a pedestal with multi-zone temperature control and multiple purge capabilities. This invention describes substrate support assemblies for a semiconductor processing apparatus. The assemblies include a pedestal and a stem coupled with the pedestal. The pedestal is designed to provide multiple regions with independently controlled temperatures. Each region features a fluid channel that ensures uniform temperature control by circulating a temperature-controlled fluid through internal channels in the stem. The fluid channels are configured in a parallel-reverse flow arrangement, enhancing efficiency. Additionally, the pedestal incorporates fluid purge channels that provide thermal isolation between the regions.
Career Highlights
Elisha Tam is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work focuses on advancing technologies that improve semiconductor processing efficiency and effectiveness.
Collaborations
Elisha has collaborated with notable coworkers, including Xinglong Chen and Jang-Gyoo Yang, contributing to various projects that push the boundaries of semiconductor technology.
Conclusion
Elisha Tam's innovative work in semiconductor processing exemplifies the impact of dedicated inventors in advancing technology. His patents reflect a commitment to improving efficiency and effectiveness in the industry.