Elham Mohimi

Title: Elham Mohimi: Innovator in Chemical Vapor Deposition Technologies

Introduction

Elham Mohimi is a prominent inventor based in Urbana, Illinois. She has made significant contributions to the field of chemical vapor deposition (CVD) technologies. With a total of two patents to her name, her work focuses on innovative methods for selectively forming metallic films on substrates.

Latest Patents

Elham Mohimi's latest patents include groundbreaking methods for area-selective CVD of metallic films using precursor gases and inhibitors. These methods allow for the formation of layers on a substrate selectively, depending on the composition of different regions. One of her notable inventions involves using an inhibitor agent to reduce the average acidity of a substrate region characterized by hydroxyl groups. This selective formation is achieved through exposure to both an inhibitor agent and a precursor gas, which includes various ligands.

Another significant patent addresses the selective deposition of metal films on conductive surfaces while leaving adjacent insulating portions uncoated. This method enables the simultaneous contact of the substrate surface with both the precursor gas and the inhibitor agent, leading to the selective formation of metal nuclei on conductive areas. The innovative approach allows for the deposition of copper on a metal substrate without affecting the adjacent silicon dioxide surface.

Career Highlights

Elham Mohimi is affiliated with the University of Illinois, where she continues to advance her research in chemical vapor deposition technologies. Her work has garnered attention for its potential applications in various industries, including electronics and materials science.

Collaborations

Elham has collaborated with notable colleagues, including John Abelson and Gregory S. Girolami. These partnerships have contributed to her innovative research and the development of her patented technologies.

Conclusion

Elham Mohimi is a trailblazer in the field of chemical vapor deposition, with her patents reflecting her commitment to innovation. Her work at the University of Illinois continues to influence advancements in materials science and engineering.