This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Canon Anelva Corporation. Active years: 2011.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2011
Title: Eitarou Morimoto: Innovator in Electrostatic Chuck Technology
Introduction
Eitarou Morimoto is a notable inventor based in Kunitachi, Japan. He has made significant contributions to the field of electrostatic technology, particularly through his innovative patent.
Latest Patents
Morimoto holds a patent for an electrostatic chuck. This device includes a dielectric board with an upper surface featuring multiple projections designed to support a substrate. Surrounding these projections are recesses, and an electrode is embedded within the dielectric board. An external power supply applies voltage to the electrode, enabling the dielectric board to generate a Johnson-Rahbeck force between the substrate and the conductor film when voltage is applied.
Career Highlights
Eitarou Morimoto is associated with Canon Anelva Corporation, where he has been instrumental in advancing electrostatic chuck technology. His work has contributed to the efficiency and effectiveness of substrate handling in various applications.
Collaborations
Morimoto has collaborated with notable coworkers, including You Tanaka and Yoshiki Aruga. Their combined expertise has further enhanced the development of innovative technologies within their field.
Conclusion
Eitarou Morimoto's contributions to electrostatic chuck technology exemplify his innovative spirit and dedication to advancing engineering solutions. His patent and work at Canon Anelva Corporation highlight the importance of collaboration and creativity in the field of technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile