The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2011
Filed:
Sep. 10, 2008
Yoshiki Aruga, Hachioji, JP;
Eitarou Morimoto, Kunitachi, JP;
You Tanaka, Fuchu, JP;
Kazuaki Kaneko, Fuchu, JP;
Yoshiki Aruga, Hachioji, JP;
Eitarou Morimoto, Kunitachi, JP;
You Tanaka, Fuchu, JP;
Kazuaki Kaneko, Fuchu, JP;
Canon Anelva Corporation, Kawasaki-Shi, Kanagawa-Ken, JP;
Abstract
An electrostatic chuck includes a dielectric board having an upper surface on which a plurality of projections for supporting a substrate on top surfaces and recesses surrounding the projections are formed, an electrode formed inside the dielectric board, and an external power supply which applies a voltage to the electrode. The dielectric board includes a conductor film formed on at least the top surface of each projection, and has a three-dimensional structure which causes the conductor film to generate a Johnson-Rahbeck force between the substrate and conductor film when a voltage is applied to the electrode.